Sputter ion pump definition

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sputter ion pump

sputter ion pump logo #21003(from the article `vacuum technology`) Capacities are available up to 14,000 cu ft per minute, with an operating pressure range of 10-2 torr to below 10-11 torr. The full speed of the pump ...
Found on http://www.britannica.com/eb/a-z/s/146
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